PD7004 MICRO ELECTRO MECHANICAL SYSTEMS Syllabus | Anna University ME

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Anna University Syllabus - Anna University ME Syllabus

PD7004 MICRO ELECTRO MECHANICAL SYSTEMS Syllabus | Anna University ME Product Design and Development Second Semester Syllabus Regulation 2013. Below is the Anna University 2013 Regulation Syllabus for 2nd Semester for ME Product Design and Development, Textbooks, Reference books, Exam portions, Question Bank, Previous year question papers, Model question papers, Class notes, Important 2 marks, 8 marks, 16 marks topics.
It is applicable for all students admitted in the Academic year 2013-2014 onwards for all its Affiliated institutions in Tamil Nadu.

PD7004 MICRO ELECTRO MECHANICAL SYSTEMS L T P C 3 0 0 3

OBJECTIVE:
To impart knowledge to the students about the design and fabrication of Micro Electro Mechanical
systems used in various products (MEMS).
OUTCOME:
Upon completion of the course, the students will be able to
 select the suitable manufacturing processes for MEMS
 adopt suitable strategies for the production and integration with sensors for MEMS.
UNIT I INTRODUCTION 8
Introduction, Materials-substrates, Additive materials. Fabrication techniques-Deposition,
Lithography, etching, Surface micro machining, Thick film screen-printing and electroplating
UNIT II MECHANICAL SENSOR PACKAGING 8
Introduction, Standard IC packages-ceramic, plastic and metal packages. Packaging process-
Electrical interconnects, Methods of die attachment, sealing techniques. MEMS mechanical sensor
packaging
UNIT III MECHANICAL TRANSDUCTION TECHNIQUES 9
Piezo resistivity, Piezoelectricity, Capacitive Techniques, Optical techniques, Resonant
techniques. Actuation techniques, Smart Sensors.MEMS Simulation and Design tools-Behavioral
model ling simulation tools and Finite element simulation tools.
UNIT IV PRESSURE SENSORS 12
Introduction.Techniques for sensing.Physics of pressure sensing-Pressure sensor
specifications.Dynamic pressure sensing.Pressure sensor types. MEMS technology pressure
sensors-Micro machined silicon diaphragms,
UNIT V FORCE, TORQUE AND INERTIAL SENSORS 8
Introduction-Silicon based devices-Optical devices-capacitive devices-Magnetic devices-Atomic
force microscope and scanning probes- micro machined accelerometer-Micro machined
Gyroscope-Future inertial micro machined sensors
TOTAL:45PERIODS
TEXT BOOK:
1. Nadim Maluf and Kirt Williams,’ An introduction to Micro electro mechanical System
Engineering, Artech House, Inc. Boston.2003
REFERENCE
1. Stephen Beeby, Graham Ensell, Michael Kraft and Neil White,’ MEMS Mechanical sensors’
Artech House, Inc. Boston 2003