MF7204 MICRO ELECTRO MECHANICAL SYSTEMS AND NANO TECHNOLOGY Syllabus | Anna University ME

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Anna University Syllabus - Anna University ME Syllabus

MF7204 MICRO ELECTRO MECHANICAL SYSTEMS AND NANO TECHNOLOGY Syllabus | Anna University ME Manufacturing Engineering Second Semester Syllabus Regulation 2013. Below is the Anna University 2013 Regulation Syllabus for 2nd Semester for ME Manufacturing Engineering, Textbooks, Reference books, Exam portions, Question Bank, Previous year question papers, Model question papers, Class notes, Important 2 marks, 8 marks, 16 marks topics.
It is applicable for all students admitted in the Academic year 2013-2014 onwards for all its Affiliated institutions in Tamil Nadu.

MF7204 MICRO ELECTRO MECHANICAL SYSTEMS AND NANO TECHNOLOGY L T P C 3 0 0 3

AIM:
 To inspire the students to expect to the trends in manufacturing of micro components and
measuring systems to nano scale.
OBJECTIVES:
 To expose the students to the evolution of micro electromechanical systems, to the various
fabrication techniques and to make students to be aware of micro actuators.
 Also to impart knowledge to the students about nano materials and various nano measurements
techniques.
UNIT I OVER VIEW OF MEMS AND MICROSYSTEMS 6
Definition – historical development – properties, design and fabrication micro-system,
microelectronics, working principle ,applications and advantages of micro system. Substrates and
wafers, silicon as substrate material, mechanical properties of Si, Silicon Compounds - silicon piezo
resistors, Galium arsenide, quartz, polymers for MEMS, conductive polymers.
12
UNIT II FABRICATION PROCESSES AND MICRO SYSTEM PACKAGING 10
Photolithography, photo resist applications, light sources, ion implantation, diffusion–Oxidation -
thermal oxidation, silicon dioxide, chemical vapour deposition, sputtering - deposition by epitaxy –
etching – bulk and surface machining – LIGA process – LASER, Electron beam ,Ion beam processes
– Mask less lithography. Micro system packaging –packaging design– levels of micro system
packaging -die level, device level and system level – interfaces in packaging – packaging
technologies- Assembly of Microsystems
UNIT III MICRO DEVICES 8
Sensors – classification – signal conversion ideal characterization of sensors micro actuators,
mechanical sensors – measurands - displacement sensors, pressure sensor, flow sensors,
Accelerometer , chemical and bio sensor - sensitivity, reliability and response of micro-sensor - micro
actuators – applications.
UNIT IV SCIENCE AND SYNTHESIS OF NANO MATERIALS 10
Classification of nano structures – Effects of nano scale dimensions on various properties – structural,
thermal, chemical, magnetic, optical and electronic properties fluid dynamics –Effect of nano scale
dimensions on mechanical properties - vibration, bending, fracture
Nanoparticles, Sol-Gel Synthesis, Inert Gas Condensation, High energy Ball Milling, Plasma
Synthesis, Electro deposition and other techniques. Synthesis of Carbon nanotubes – Solid carbon
source based production techniques – Gaseous carbon source based production techniques –
Diamond like carbon coating. Top down and bottom up processes.
UNIT V CHARACTERIZATION OF NANO MATERIALS 11
Nano-processing systems – Nano measuring systems – characterization – analytical imaging
techniques – microscopy techniques, electron microscopy scanning electron microscopy, confocal
LASER scanning microscopy - transmission electron microscopy, transmission electron microscopy,
scanning tunneling microscopy, atomic force microscopy, diffraction techniques – spectroscopy
techniques – Raman spectroscopy, 3D surface analysis – Mechanical, Magnetic and thermal
properties – Nano positioning systems.
TOTAL: 45 PERIODS
REFERENCES:
1. Sami Franssila, Introduction to Micro fabrication, John Wiley & sons Ltd, 2004. ISBN:470-85106-6
2. Norio Taniguchi, Nano Technology, Oxford University Press, New York, 2003
3. Charles P Poole, Frank J Owens, Introduction to Nano technology, John Wiley and Sons, 2003
4. Tai – Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata-McGraw Hill, New Delhi,
2002.
5. Mark Madou , Fundamentals of Microfabrication, CRC Press, New York, 1997.
6. Mohamed Gad-el-Hak, MEMS Handbook, CRC press, 2006, ISBN : 8493-9138-5
7. Waqar Ahmed and Mark J. Jackson, Emerging Nanotechnologies for Manufacturing, Elsevier
Inc.,2013,ISBN : 978-93-82291-39-8
8. Julian W. Hardner Micro Sensors, Principles and Applications, CRC Press 1993.