ME3017 MICRO ELECTRO MECHANICAL SYSTEMS SYLLABUS | ANNA UNIVERSITY BE MECHATRONICS ENGINEERING 8TH SEMESTER SYLLABUS REGULATION 2008 2011 2012-2013 BELOW IS THE ANNA UNIVERSITY 8TH SEMESTER B.E MECHATRONICS ENGINEERING DEPARTMENT SYLLABUS, TEXTBOOKS, REFERENCE BOOKS,EXAM PORTIONS,QUESTION BANK,PREVIOUS YEAR QUESTION PAPERS,MODEL QUESTION PAPERS, CLASS NOTES, IMPORTANT 2 MARKS, 8 MARKS, 16 MARKS TOPICS. IT IS APPLICABLE FOR ALL STUDENTS ADMITTED IN THE YEAR 2011 2012-2013 (ANNA UNIVERSITY CHENNAI,TRICHY,MADURAI, TIRUNELVELI,COIMBATORE), 2008 REGULATION OF ANNA UNIVERSITY CHENNAI AND STUDENTS ADMITTED IN ANNA UNIVERSITY CHENNAI DURING 2009
ME3017 MICRO ELECTRO MECHANICAL SYSTEMS L T P C
3 0 0 3
UNIT I INTRODUCTION 9
Overview-Microsystems and microelectronics -definition-MEMS materials-scaling laws-scaling
in geomentry-scaling in rigid body dynamics- scaling in electrostatic forces- scaling in electricityscaling
in fluid mechanics- scaling in heat transfer.
UNIT II MICRO SENSORS & ACTUATORS 9
Working principle of Microsystems - micro actuation techniques - micro sensors-types -
Microactuators – types – micropump – micromotors – micro – valves – microgrippers -micro
accelerometers
UNIT III FABRICATION PROCESS 9
Substrates-single crystal silicon wafer formation-Photolithography-Ion implantation-Diffusion –
Oxidation-CVD-Physical vapor deposition-Deposition by epitaxy-etching process
UNIT IV MICRO SYSTEM MANUFACTURING 9
Bulk Micro manufacturing- surface micro machining –LIGA-SLIGA-Micro system packagingmaterials-
die level-device level-system level-packaging techniques-die preparation-surface
bonding-wire bonding-sealing
UNIT V MICRO SYSTEM DESIGN 9
Design considerations-process design-mask layout design- mechanical design-applications of
micro system in -automotive industry-bio medical –aero space-telecommunications.
TOTAL = 45 PERIODS
REFERENCES
1. Mohamed Gad-el-Hak, The MEMS Hand book, CRC press 2002.
2. Julian W.Gardner,Vijay K.Varadan,Osama O.Awadel Karim,Microsensors MEMS and Smart
Devices, John Wiby & sons Ltd.,2001.
3. S.Fatikow,U.Rembold,Microsystem Technology and Microrobotics,Springer-Verlag Berlin
Heidelberg ,1997.
4. Tai-Ran Hsu,MEMS & Microsystems Design and Manufacture,Tata McGraw-Hill,2006.
5. Francis E.H Tay and W.O Choong, Microfludics and BioMEMS Applications, Springer, 2002.
ME3017 MICRO ELECTRO MECHANICAL SYSTEMS L T P C
3 0 0 3
UNIT I INTRODUCTION 9
Overview-Microsystems and microelectronics -definition-MEMS materials-scaling laws-scaling
in geomentry-scaling in rigid body dynamics- scaling in electrostatic forces- scaling in electricityscaling
in fluid mechanics- scaling in heat transfer.
UNIT II MICRO SENSORS & ACTUATORS 9
Working principle of Microsystems - micro actuation techniques - micro sensors-types -
Microactuators – types – micropump – micromotors – micro – valves – microgrippers -micro
accelerometers
UNIT III FABRICATION PROCESS 9
Substrates-single crystal silicon wafer formation-Photolithography-Ion implantation-Diffusion –
Oxidation-CVD-Physical vapor deposition-Deposition by epitaxy-etching process
UNIT IV MICRO SYSTEM MANUFACTURING 9
Bulk Micro manufacturing- surface micro machining –LIGA-SLIGA-Micro system packagingmaterials-
die level-device level-system level-packaging techniques-die preparation-surface
bonding-wire bonding-sealing
UNIT V MICRO SYSTEM DESIGN 9
Design considerations-process design-mask layout design- mechanical design-applications of
micro system in -automotive industry-bio medical –aero space-telecommunications.
TOTAL = 45 PERIODS
REFERENCES
1. Mohamed Gad-el-Hak, The MEMS Hand book, CRC press 2002.
2. Julian W.Gardner,Vijay K.Varadan,Osama O.Awadel Karim,Microsensors MEMS and Smart
Devices, John Wiby & sons Ltd.,2001.
3. S.Fatikow,U.Rembold,Microsystem Technology and Microrobotics,Springer-Verlag Berlin
Heidelberg ,1997.
4. Tai-Ran Hsu,MEMS & Microsystems Design and Manufacture,Tata McGraw-Hill,2006.
5. Francis E.H Tay and W.O Choong, Microfludics and BioMEMS Applications, Springer, 2002.
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