BM 2029 BIOMEMS SYLLABUS | ANNA UNIVERSITY BE BIOMEDICAL ENGINEERING 8TH SEMESTER SYLLABUS REGULATION 2008 2011 2012-2013 BELOW IS THE ANNA UNIVERSITY 8TH SEMESTER B.E BIOMEDICAL ENGINEERING DEPARTMENT SYLLABUS, TEXTBOOKS, REFERENCE BOOKS,EXAM PORTIONS,QUESTION BANK,PREVIOUS YEAR QUESTION PAPERS,MODEL QUESTION PAPERS, CLASS NOTES, IMPORTANT 2 MARKS, 8 MARKS, 16 MARKS TOPICS. IT IS APPLICABLE FOR ALL STUDENTS ADMITTED IN THE YEAR 2011 2012-2013 (ANNA UNIVERSITY CHENNAI,TRICHY,MADURAI, TIRUNELVELI,COIMBATORE), 2008 REGULATION OF ANNA UNIVERSITY CHENNAI AND STUDENTS ADMITTED IN ANNA UNIVERSITY CHENNAI DURING 2009
BM 2029 BIOMEMS L T P C
3 0 0 3
UNIT I MEMS AND MICROSYSTEMS 9
Typical MEMs and Microsystems, , materials for MEMS - active substrate materials-
Silicon and its compounds, Silicon piezoresistors, Gallium Arsenide, quartz, polymers.
Micromachining- photolithography, thin film deposition, doping, etching, bulk machining,
wafer bonding, LIGA
UNIT II MICROSENSORS AND ACUATORS 9
Mechanics for MEMs design- static bending of thin plates,mechanical vibration,
thermomechanics, fracture and thin film mechanics. Mechanical sensors and actuators –
beam and cantilever – microplates, strain, pressure and flow measurements, gyroscope,
piezoactuator.Thermal sensors and actuators- micromachined thermocouple probe, Peltier
effect hat pumps, thermal flow sensors
UNIT III MICRO OPTO ELECTRO MECHANICAL SYSTEMS 9
Fundamental principle of MOEMS technology, light modulators, beam splitter, microlens,
digital micromirror devices, light detectors, grating light valve, optical switch
UNIT IV MICROFLUIDIC SYSTEMS 9
Fluid dynamics, continuity equation, momentum equation, equation of motion, laminar flow
in circular conduits, fluid flow in microconduits, in submicrometer and nanoscale.
Microscale fluid, expression for liquid flow in a channel, fluid actuation methods,
dielectriophoresis, microfluid dispenser, microneedle, micropumps-continuous flow system
UNIT V BIOMEMS 9
CAD for MEMs, Drug delivery, micro total analysis systems (MicroTAS) detection and
measurement methods, microsystem approaches to polymerase chain reaction (PCR),
DNA hybridization
TEXT BOOKS:
1. Nitaigour Premchand Mahalik, “ MEMS”, Tata McGraw Hill Publishing Company, New
Delhi, 2007
2. Tai Ran Hsu , “MEMS and Microsystems design and manufacture”, Tata McGraw Hill
Publishing Company, New Delhi, 2002
3. Wanjun Wang, Stephen A.Soper,”BioMEMs: Technologies and applications”, CRC
Press, New York, 2007
BM 2029 BIOMEMS L T P C
3 0 0 3
UNIT I MEMS AND MICROSYSTEMS 9
Typical MEMs and Microsystems, , materials for MEMS - active substrate materials-
Silicon and its compounds, Silicon piezoresistors, Gallium Arsenide, quartz, polymers.
Micromachining- photolithography, thin film deposition, doping, etching, bulk machining,
wafer bonding, LIGA
UNIT II MICROSENSORS AND ACUATORS 9
Mechanics for MEMs design- static bending of thin plates,mechanical vibration,
thermomechanics, fracture and thin film mechanics. Mechanical sensors and actuators –
beam and cantilever – microplates, strain, pressure and flow measurements, gyroscope,
piezoactuator.Thermal sensors and actuators- micromachined thermocouple probe, Peltier
effect hat pumps, thermal flow sensors
UNIT III MICRO OPTO ELECTRO MECHANICAL SYSTEMS 9
Fundamental principle of MOEMS technology, light modulators, beam splitter, microlens,
digital micromirror devices, light detectors, grating light valve, optical switch
UNIT IV MICROFLUIDIC SYSTEMS 9
Fluid dynamics, continuity equation, momentum equation, equation of motion, laminar flow
in circular conduits, fluid flow in microconduits, in submicrometer and nanoscale.
Microscale fluid, expression for liquid flow in a channel, fluid actuation methods,
dielectriophoresis, microfluid dispenser, microneedle, micropumps-continuous flow system
UNIT V BIOMEMS 9
CAD for MEMs, Drug delivery, micro total analysis systems (MicroTAS) detection and
measurement methods, microsystem approaches to polymerase chain reaction (PCR),
DNA hybridization
TEXT BOOKS:
1. Nitaigour Premchand Mahalik, “ MEMS”, Tata McGraw Hill Publishing Company, New
Delhi, 2007
2. Tai Ran Hsu , “MEMS and Microsystems design and manufacture”, Tata McGraw Hill
Publishing Company, New Delhi, 2002
3. Wanjun Wang, Stephen A.Soper,”BioMEMs: Technologies and applications”, CRC
Press, New York, 2007
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